{"product_id":"9780128177860","title":"Handbook of Silicon Based MEMS Materials and Technologies (Micro \u0026 Nano Technologies) (3RD)","description":"\u003cp\u003eHandbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures.\u003c\/p\u003e\n\n\u003cp\u003e The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.\u003c\/p\u003e","brand":"Elsevier Science Publishing Co Inc","offers":[{"title":"Default Title","offer_id":45376027263055,"sku":"00000_00000_00000_00000","price":10500.0,"currency_code":"TWD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0672\/9174\/2287\/files\/9780128177860-1.jpg?v=1780181388","url":"https:\/\/kinokuniya.com.tw\/products\/9780128177860","provider":"Books Kinokuniya Taiwan","version":"1.0","type":"link"}